MEMS & Sensors

MEMS sensors, or Microelectro Mechanical Systems, are multidisciplinary and cutting-edge research fields developed on the basis of microelectronic technology. After more than 40 years of development, it has become one of the major scientific and technological fields that have attracted the attention of the world. It involves a variety of disciplines and technologies such as electronics, machinery, materials, physics, chemistry, biology, medicine, etc., and has broad application prospects. As of 2010, there are more than 600 units in the world engaged in the development and production of MEMS, and hundreds of products including miniature pressure sensors, acceleration sensors, microinkjet printheads, and digital micromirror displays have been developed, of which MEMS sensors account for a considerable proportion. MEMS sensors are new types of sensors manufactured using microelectronics and micromachining technology. Compared with traditional sensors, it has the characteristics of small size, light weight, low cost, low power consumption, high reliability, suitable for mass production, easy integration and intelligence. At the same time, its feature size in the micron order allows it to perform certain functions that cannot be achieved with conventional mechanical sensors.